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PDF] Study on Uniform Plasma Generation Mechanism of Electron Cyclotron Resonance Etching Reactor | Semantic Scholar
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Figure 4 from Electron cyclotron maser instability (ECMI) in strong magnetic guide field reconnection | Semantic Scholar
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Effect of H2 addition on SiCN film growth in an electron cyclotron resonance plasma chemical vapor deposition reactor - Journal of Materials Chemistry (RSC Publishing) DOI:10.1039/A908523H
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Figure 1 from New Compact Electron Cyclotron Resonance Plasma Source for Silicon Nitride Film Formation in Minimal Fab System | Semantic Scholar
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Color online) Schematic of the Electron-Cyclotron Plasma Reactor used... | Download Scientific Diagram
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